Correlating structural and mechanical properties of AlN/TiN superlattice films

0509788 - ÚFM 2020 RIV GB eng J - Journal Article
Koutná, N. - Řehák, Petr - Chen, Z. - Bartosik, M. - Fallmann, M. - Černý, M. - Zhang, Z. - Friák, Martin - Šob, Mojmír - Mayrhofer, P. H. - Holec, D.
Correlating structural and mechanical properties of AlN/TiN superlattice films.
Scripta Materialia. Roč. 165, MAY (2019), s. 159-163. ISSN 1359-6462. E-ISSN 1872-8456
R&D Projects: GA ČR(CZ) GA16-24711S
Institutional support: RVO:68081723
Keywords : al-n * growth * 1st-principles * energies * hardness * mo * Superlattice * Ab initio * tem * Elasticity cleavage
OECD category: Composites (including laminates, reinforced plastics, cermets, combined natural and synthetic fibre fabrics
Impact factor: 5.079, year: 2019
Method of publishing: Limited access
https://www.sciencedirect.com/science/article/pii/S1359646219301046?via%3Dihub

Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice-providing indications regarding crack initiation processes-is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses. (C) 2019 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
Permanent Link: http://hdl.handle.net/11104/0300826