Plasma abatement of perfluorinated compounds

0506390 - ÚFP 2020 RIV SI eng C - Conference Paper (international conference)
Živný, Oldřich - Hlína, Michal - Březina, Václav - Brom, Petr - Serov, Anton - Halinouski, Anton - Mašláni, Alan
Plasma abatement of perfluorinated compounds.
8th Central European Symposium on Plasma Chemistry. Ljubljana: Plasmadis, 2019, s. 78-78. ISBN 978-961-94716-0-9.
[8th Central European Symposium on Plasma Chemistry. Gozd Martuljek (SI), 26.05.2019-30.05.2019]
R&D Projects: GA ČR(CZ) GC17-10246J
Institutional support: RVO:61389021
Keywords : Perfluorinated compounds * waste treatment * gasification
OECD category: Fluids and plasma physics (including surface physics)

Perfluorinated compounds (PFCs) are widely utilized industrial gases, including electronic semiconductor etchants, refrigerants and inert media for power switch gears (sulphur hexafluoride, SF6). These gases are potent source of global warming effect. Because of extremely high stability of PCFs only very high temperature as provided by plasma is effective for their destruction. Water and gas stabilized DC-plasma torch for generating thermal steam plasma has been already used for efficient abatement of CF4, and this work is going on to abate SF6. The experiments were carried out at 20 kW and 40 kW of torch power. The highest destruction efficiency was attained in the mixture at 40 kW of torch power for which the complete removal was attained even for concentration >15% in argon. An effect of additional gas as a reaction agent was also observed for both CF4 and SF6. It was found the certain addition of hydrogen enhances the destruction efficiency.
Permanent Link: http://hdl.handle.net/11104/0297637