Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge

0505018 - FZÚ 2020 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Straňák, V. - Helm, C.A. - Hubička, Zdeněk
Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge.
Journal of Applied Physics. Roč. 125, č. 1 (2019), s. 1-7, č. článku 013301. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA MŠMT EF16_019/0000760; GA MŠMT EF16_027/0008215; GA ČR GA17-08389S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; MOBILITY FZU(XE) CZ.02.2.69/0.0/0.0/16_027/0008215
Institutional support: RVO:68378271
Keywords : HiPIMS * IEDF * dimer * titanium * argon * mass spectrometry
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.286, year: 2019
Method of publishing: Limited access
https://doi.org/10.1063/1.5055356

Generation of singly charged Ar+ and Ti+, doubly charged Ar2+ and Ti2+, and of Ar2+ and Ti2+ dimer ions in a high power impulse magnetron sputtering (HiPIMS) discharge with a Ti cathode was investigated. Energy-resolved mass spectrometry was employed. The argon gas pressures varied between 0.5 and 2.0 Pa. Energy spectra of monomer ions are composed of low- and high-energy components. The energetic position of the high-energy component is approximately twice as large for doubly charged ions compared to singly charged ions. Intensities of Ar2+ and Ti2+ dimer ions are considerably smaller during HiPIMS compared to dc magnetron sputtering. compared to dc magnetron sputtering. Published under license by AIP Publishing.
Permanent Link: http://hdl.handle.net/11104/0296545