Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests

0504377 - ÚFM 2020 RIV CH eng J - Journal Article
Tinoco Navaro, Hector Andres - Holzer, Jakub - Pikálek, Tomáš - Buchta, Zdeněk - Lazar, Josef - Chlupová, Alice - Kruml, Tomáš - Hutař, Pavel … Total 9 authors
Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests.
Thin Solid Films. Roč. 672, FEB (2019), s. 66-74. ISSN 0040-6090. E-ISSN 1879-2731
R&D Projects: GA MŠMT(CZ) EF16_013/0001823; GA MŠMT(CZ) LO1212
Institutional support: RVO:68081723 ; RVO:68081731
Keywords : Elastic properties * Bulge test * Thin film * Finite element analysis * Silicon nitride
OECD category: Ceramics; Electrical and electronic engineering (UPT-D)
Impact factor: 2.030, year: 2019
Method of publishing: Limited access
https://www.sciencedirect.com/science/article/pii/S0040609018308484?via%3Dihub

This paper describes and applies a methodology to determine the elastic properties of freestanding thin mem-branes by means of a bulge test and a numerical approach. The numerical procedure is based on the combinationof two standard methods i.e. finite element analysis and classical analytical solutions to calculate elasticproperties of thin films. Bulge tests were conducted on silicon nitride (Si3N4) monolayer of 2 × 2mm(square)and 3.5 × 1.5mm(rectangular) membranes with the aim to determine elastics properties (Young's modulus (E)and Poison's ratio (v)) that define the load-deflection curves of both membranes. With this purpose, an errorfunction was constructed for each membrane which involved finite element solutions, analytical solutions andexperimental measurements. Error functions were found and minimized by mapping a set of elastic parametersfor the two membranes (square and rectangular). A unique solution was determined in the intersection of bothlinear approximations, obtaining 236GPaforEand 0.264 forv. It is well known that in a traditional bulge testanalysis only one of both biaxial modulus can be determined and not a combination ofEandv. Numerical resultsshow that calculated load-deflection curves agree well with the measurements obtained for both square andrectangular membranes experimentally. The proposed methodology is only applicable in thin films with elasticbehavior, however generalization for more complicated geometries is possible.
Permanent Link: http://hdl.handle.net/11104/0300846