Colour centres in diamond and light extraction enhancement via photonic crystal slabs

0502333 - FZÚ 2019 RIV SK eng C - Conference Paper (international conference)
Varga, Marián - Ondič, Lukáš - Fait, Jan - Domonkos, Mária - Stehlík, Štěpán - Hruška, Karel - Cajzl, J. - Nekvindová, P. - Potocký, Štěpán - Dragounová, Kateřina - Kromka, Alexander
Colour centres in diamond and light extraction enhancement via photonic crystal slabs.
Conference proceedings of the 20th School of Vacuum Technology - Nanoelectronics and Vacuum. Bratislava: Slovenská vákuová spoločnosť, 2018 - (Michalka, M.; Vincze, A.), s. 50-52. ISBN 978-80-99905-00-0.
[School of Vacuum Technology - Nanoelectronics and Vacuum /20./. Štrbské Pleso (SK), 23.10.2018-26.10.2018]
R&D Projects: GA ČR GJ16-09692Y
Institutional support: RVO:68378271
Keywords : diamond * photonic crystals * microsphere lithography * ion implantation
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

In this contribution, firstly we focus on the ex situ (implantation of Er ions) and in situ (direct incorporation of Si atoms during CVD) doping of single or polycrystalline diamond films in order to understand the dopants incorporation phenomena and activation of the SiV optical centres. In the case of the Er implanted diamond the effect of co-implantation (Yb, Al) and thermal annealing processes on the PL intensity will be pointed out. Secondly, the fabrication of polycrystalline diamond-based photonic crystal slabs employing a) electron beam lithography or b) microsphere lithography, both processes combined with reactive ion etching, will be presented. Photonic structures with subwavelength lattice constants for visible and near IR regions were successfully fabricated.

Permanent Link: http://hdl.handle.net/11104/0294274