The electrical and photoluminescence properties of hydrogen and oxygen plasma treated ZnO thin films

0502240 - FZÚ 2019 CZ eng A - Abstract
Chang, Yu-Ying - Remeš, Zdeněk
The electrical and photoluminescence properties of hydrogen and oxygen plasma treated ZnO thin films.
17th Joint Vacuum Conference - Book of abstracts. Praha: Czech Vacuum Society, 2018 - (Mašek, K.; Jungwirthová, I.; Drbohlav, J.). s. 118-118
[Joint Vacuum Conference /17./. 10.09.2018-14.09.2018, Olomouc]
R&D Projects: GA MŠMT(CZ) LTC17029; GA ČR GC16-10429J
Institutional support: RVO:68378271
Keywords : ZnO * nanocolumns * photoluminescence * magnetron sputtering
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

Plasma treatment changes significantly the electrical conductivity and photoluminescence of the nominally undoped nanocrystalline ZnO thin films deposited at 300°C with DC reactive magnetron sputtering of Zn metal target in the gas mixture of argon and oxygen plasma. However, changes of electrical conductivity, free carrier concentration and localized defect density have been observed in hydrogenated ZnO thin films under high density DC electrical current. To clarify these changes, the mobility and carrier concentration were measured by the temperature dependent electrical resistivity and Hall effect using the van der Pauw method. We show how the plasma treatment is related to electrical properties and the photoluminescence spectra.

Permanent Link: http://hdl.handle.net/11104/0294184