In situ XPS study of vacuum annealed diamond and DLC thin films

0502226 - FZÚ 2019 CZ eng A - Abstract
Artemenko, Anna - Marton, M. - Romanyuk, Olexandr - Dragounová, Kateřina - Kromka, Alexander
In situ XPS study of vacuum annealed diamond and DLC thin films.
17th Joint Vacuum Conference - Book of abstracts. Praha, 2018 - (Mašek, K.; Jungwirthová, I.; Drbohlav, J.). s. 140-141
[Joint Vacuum Conference /17./. 10.09.2018-14.09.2018, Olomouc]
R&D Projects: GA ČR(CZ) GBP108/12/G108
Institutional support: RVO:68378271
Keywords : NCD * DLC * in situ * vacuum
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

Nanocrystalline diamond (NCD) and diamond-like carbon (DLC) films were proved to have unique surface properties useful for various applications, which are subjected to significant heating under operational conditions. In the present study, the thermal stability of H- or O-terminated NCD and DLC film surfaces were investigated. The as grown NCD and DLC surfaces were modified by RF plasma in appropriate gas mixtures. The H/O-NCD and DLC films were annealed up to 800°C in vacuum and analyzed in situ by XPS and ex situ by SEM and Raman spectroscopy. SEM and Raman measurements confirmed stability of annealed H/O-NCD samples. XPS analysis showed that oxygen concentration is reduced significantly (from 8 to 4 at.%) at 300°C and dropped almost to zero at 800 °C on O-NCD films. The O-DLC films have lost the oxygen slowly (from 13 to 6 at.% at 300°C). The vacuum annealing above 550°C resulted in both H- and O-DLC film delamination. This work was supported by the project GACR P108/12/G108.
Permanent Link: http://hdl.handle.net/11104/0294175