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STEM detector in SEM

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    0502126 - ÚPT 2019 NL eng A - Abstract
    Konvalina, Ivo - Paták, Aleš - Materna-Mikmeková, Eliška - Müllerová, Ilona
    STEM detector in SEM.
    FEELIS-III. Amsterdam: ARCNL, 2018. s. 55-56.
    [LEELIS-III. Low Energy Elwctrons: Lithography, Imaging and Soft Matter. 12.11.2018-13.11.2018, Amsterdam]
    R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
    Institutional support: RVO:68081731
    Keywords : STEM * SEM
    OECD category: Electrical and electronic engineering

    Nowadays, scanning electron microscopes (SEM) are commonly equipped with technique for svanning transmission electron microscopy (STEM). The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope is used to detect transmitted electrons (TEs).
    Permanent Link: http://hdl.handle.net/11104/0294115

     
     
Number of the records: 1  

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