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The electrical and optical properties of nanocrystalline ZnO thin films
- 1.0501963 - FZÚ 2019 CZ eng A - Abstract
Chang, Yu-Ying - Stuchlík, Jiří - Hubík, Pavel - Dragounová, Kateřina - Remeš, Zdeněk
The electrical and optical properties of nanocrystalline ZnO thin films.
Book of Abstracts of the 28th Joint Seminar Development of Materials Science in Research and Education. Praha: Institute of Physics of the Czech Academy of Sciences, 2018 - (Kožíšek, Z.; Král, R.; Zemenová, P.). s. 21-21. ISBN 978-80-905962-8-3.
[Joint Seminar Development of Materials Science in Research and Education /28./. 03.09.2018-07.09.2018, Pavlov]
R&D Projects: GA ČR GC16-10429J; GA MŠMT(CZ) LTC17029
Institutional support: RVO:68378271
Keywords : ZnO * photoluminescence * magnetron sputtering
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
DC reactive magnetron sputtering of Zn metal target in the gas mixture of argon and oxygen plasma has been applied to deposit nominally undoped nanocrystalline ZnO thin films. The changes of electrical conductivity, free carrier concentration and localized defect density have been observed in ZnO thin films after hydrogen plasma treatment. To clarify these changes, the mobility and carrier concentration were measured by the temperature dependent electrical resistivity and Hall effect using the van der Pauw method. We show how the plasma treatment is related to the electrical properties and optical absorption, photoluminescence and Raman spectra.
Permanent Link: http://hdl.handle.net/11104/0293931
Number of the records: 1