Carbon overlayer from hydrocarbon precursors: Electron-beam-induced deposition/removal

0501304 - ÚPT 2019 GB eng A - Abstract
Frank, Luděk
Carbon overlayer from hydrocarbon precursors: Electron-beam-induced deposition/removal.
16th International Conference on Emerging Materials and Nanotechnology. Proceedings. Vol. S7. London: Omics International, 2018. s. 54. ISSN 2169-0022.
[International Conference on Emerging Materials and Nanotechnology /16./. 22.03.2018-23.03.2018, London]
Institutional support: RVO:68081731
Keywords : Electron-beam-induced * carbon overlayer
OECD category: Nano-processes (applications on nano-scale)

The creation of various nanostructures on surfaces by means of the electron-beam-induced deposition of carbon from hydrocarbon precursors has proven to be a productive nanotechnological tool. On the other hand, the same phenomenon represents an unpleasant challenge when operating a scanning electron microscope with the usual standard vacuum in the specimen chamber. Even under ultrahigh vacuum conditions, a successful solution has to include in-situ cleaning of the surface under observation. Our experiments have revealed the phenomenon to be crucially dependent on the energy of incident electrons to such an extent that deposition can be converted to removal of the precursors, thereby preventing carbon coating. In addition to the electron energy, other important governing factors have been identified including the electron dose, the electron current, the electric field above the surface in question and the presence of a gas such as oxygen.
Permanent Link: http://hdl.handle.net/11104/0293293