Prospects of Scanning Low Energy Electron Microscopy in Material Science

0501096 - ÚPT 2019 GB eng A - Abstract
Müllerová, Ilona - Mikmeková, Šárka - Materna Mikmeková, Eliška - Frank, Luděk - Matsuda, K.
Prospects of Scanning Low Energy Electron Microscopy in Material Science.
Microscopy. Roč. 67, S2 (2018), i18. ISSN 2050-5698. E-ISSN 2050-5701.
[Symposium of The Japanese Society of Microscopy /61./. 11.03.2018-11.03.2018, Toyama]
R&D Projects: GA TA ČR(CZ) TE01020118
Institutional support: RVO:68081731
Keywords : low energy electrons * precipitates
OECD category: Nano-materials (production and properties)

Progress in material science is connected with a precise and accurate knowledge of a relationship between a material structure and its final properties. New, more sensitive method has to be developed to study modern materials. Low energy (<1 keV) and very low energy (<100 eV) scanning electron microscopy (SLEEM) is the excellent tool to study precipitates, surfaces, crystal orientations and even 2D materials in the scale of units of nm. The imaging of the structures is possible in the reflected and in the transmitted modes by one or multichannel detectors to distinguish the angular distribution of emitted electron trajectories. High contrast is obtained especially at very low primary beam energies and even atomic layers or extremely small crystals ca be imaged with high lateral resolution. SLEEM opens huge amount of new possibilities for materials characterization and brings novel information enabling development of advanced materials.
Permanent Link: http://hdl.handle.net/11104/0293104