Silver micro drop structured twice around the earth

0500944 - ÚPT 2019 RIV CZ eng C - Conference Paper (international conference)
Meluzín, Petr - Tryhuk, V. - Horáček, Miroslav - Knápek, Alexandr - Krátký, Stanislav - Matějka, Milan - Kolařík, Vladimír
Silver micro drop structured twice around the earth.
Metal 2018 - 27th International conference on metallurgy and materials, Conference Proceedings. Ostrava: TANGER Ltd, 2018, s. 1175-1180. ISBN 978-80-87294-84-0.
[International Conference on Metallurgy and Materials /27./. METAL 2018. Brno (CZ), 23.05.2018-25.05.2018]
R&D Projects: GA TA ČR TE01020233; GA TA ČR TG03010046; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : metallic thin layer * planar surface structure * phyllotactic spiral * e-beam writer
OECD category: Optics (including laser optics and quantum optics)

Planar micro structuring of thin metallic layers allows to achieve required surface properties of metallic layers covering bulk materials. Recently, the arrangement of micro holes or pillars placed around the primary spiral according to a phyllotactic model was presented. This deterministically aperiodic planar arrangement was used for benchmarking purposes of the e-beam writer patterning. This arrangement based on single primary spiral and a variety of derived secondary spirals has several interesting properties. One of them is a very low ratio between the area populated by individual micro elements and the length of the primary phyllotactic spiral. This paper presents analysis of the phyllotactic spiral length and the rising gradient at the spiral outer edge. The practical part of the presented work deals with the patterning of a thin silver layer deposited on the silicon or glass substrates using e-beam pattern generation, lithography techniques and related technologies. An interesting impact of the mentioned spiral properties on the e-beam writing strategies and the exposure ordering strategy are also discussed.
Permanent Link: http://hdl.handle.net/11104/0292979