Surface profilometry by digital holography

0499413 - ÚFP 2020 RIV US eng C - Conference Paper (international conference)
Psota, Pavel - Lédl, Vít - Kaván, František - Matoušek, O. - Mokrý, P.
Surface profilometry by digital holography.
IEEE International Conference on Emerging Technologies and Factory Automation. New York: IEEE, 2017, s. 1-5. ISBN 978-1-5090-6505-9. ISSN 1946-0759.
[22nd IEEE International Conference on Emerging Technologies and Factory Automation. Limassol (CY), 12.09.2017-15.09.2017]
R&D Projects: GA ČR(CZ) GA16-11965S
Institutional support: RVO:61389021
Keywords : Surface profilometry * Digital holography * Frequency scanning * Absolute measurement
OECD category: Electrical and electronic engineering

This paper presents newly developed method for measurement of surface topography based on frequency scanning digital holography. Digital holography allows for direct computation of the phase field of the wavefront scattered by an object. A tuning of the light source optical frequency results in linear phase variation with respect to the optical frequency. Slope of the linear function in every single pixel corresponds to absolute measurement of optical path difference and thus topography map of the surface can be retrieved. Principle of this contactless method is introduced and experimentally verified. The method can be used for measurement of complex geometries of common manufacturing parts as well as for topography measurement of complex composite structures, and active acoustic metasurfaces.
Permanent Link: http://hdl.handle.net/11104/0291627