Abatement of perfluorinated compounds using thermal steam plasma

0498175 - ÚFP 2019 RIV IT eng C - Conference Paper (international conference)
Živný, Oldřich - Hlína, Michal - Březina, Václav - Brom, Petr - Serov, Anton - Halinouski, Anton - Mašláni, Alan
Abatement of perfluorinated compounds using thermal steam plasma.
11th International Symposium on Non-Thermal/Thermal Plasma Pollution Control Technology & Sustainable Energy. Padova: Padova University Press, 2018. ISBN 978-88-6938-129-4.
[11th International Symposium on Non-Thermal/Thermal Plasma Pollution Control Technology & Sustainable Energy. Montegrotto Terme (IT), 01.07.2018-05.07.2018]
R&D Projects: GA ČR(CZ) GC17-10246J
Institutional support: RVO:61389021
Keywords : Thermal steam plasma * perfluorinated compounds * plasma abatement * greenhouse gases
OECD category: Fluids and plasma physics (including surface physics)
http://isntp11.altervista.org/

Perfluorinated compounds (PFCs) increasingly utilized in electronic manufacturing are potent source of global warming effect. Because of extremely high stability of PCFs only very high temperature is effective for their destruction. Thermal plasma offers higher destruction and removal efficiency as compared to conventional methods allowing to reach sufficiently high temperature for effective destruction of the most persistent PFCs. The aim pursued by this work is to apply water and gas stabilized DC-plasma torch for generating steam plasma for efficient abatement of the most persistent PFC, i.e., CF4, and to observe a dependence of destruction and removal efficiency on gas mixed with CF4, concentration of CF4 and input arc power of the plasma torch.
Permanent Link: http://hdl.handle.net/11104/0290574