Microsphere lithography for scalable polycrystalline diamond- based near-infrared photonic crystals fabrication

0496443 - FZÚ 2019 RIV GB eng J - Journal Article
Domonkos, Mária - Varga, Marián - Ondič, Lukáš - Gajdošová, L. - Kromka, Alexander
Microsphere lithography for scalable polycrystalline diamond- based near-infrared photonic crystals fabrication.
Materials and Design. Roč. 139, Feb (2018), s. 363-371. ISSN 0264-1275. E-ISSN 1873-4197
R&D Projects: GA ČR(CZ) GBP108/12/G108; GA MŠMT 7AMB17AT013
Institutional support: RVO:68378271
Keywords : polycrystalline diamond * microsphere lithography * surface roughness * photonic crystal * optical measurements
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 5.770, year: 2018

We demonstrate the fabrication of a polycrystalline diamond-based PhC slab using microsphere lithography. First, the essential issues of MSL on rough diamond surfaces are demonstrated. Second, we fabricate a diamond-based PhC composed of a hexagonal lattice of air holes and tuned to have a leaky mode in the NIR region at 1.31 μm. A monolayer of plasma-treated PS microspheres with controllable size and periodicity, combined with a metal mask, are utilised as templates in the fabrication process. The diamond films and PhCs are characterised using SEM, AFM, Raman spectroscopy, reflection, and transmission measurements. In order to investigate the optical properties of the PhC, the experimental measurements are compared with simulation outputs. The successful employment of MSL on rough diamond films with their unique properties opens the road to the large scale fabrication of highly durable and chemically inert scalable structures.

Permanent Link: http://hdl.handle.net/11104/0289223