Tantalum Oxide Dielectrics Fired by Spark Plasma Sintering

0495674 - ÚFP 2019 RIV GB eng C - Conference Paper (international conference)
Ctibor, Pavel - Sedláček, J.
Tantalum Oxide Dielectrics Fired by Spark Plasma Sintering.
Proceedings of the EURO PM2018 – European powder metallurgy association (EPMA) Congress and Exhibition. EPMA, Haughmond View, Sitka Drive, Shrewsburry: European powder metallurgy association, 2018, č. článku 3983352. ISBN 978-1-899072-50-7.
[EURO PM2018 – European powder metallurgy association (EPMA) Congress and Exhibition. Bilbao (ES), 14.10.2018-18.10.2018]
Institutional support: RVO:61389021
Keywords : tantalum oxide * spark plasma sintering * dielectrics
OECD category: Ceramics

Tantalum pentoxide Ta2O5 was sintered by spark plasma sintering (SPS) using a commercial micrometric powder. Influence of the SPS process and subsequent annealing on microstructure, phase composition and dielectric properties was studied. After sintering the product is oxygen-deficient because of low pressure in the sintering chamber. The evacuation is necessary for the process because of carbon pistons and carbon die used for powder compaction. After subsequent annealing in air the color of the product Ta2O5 is restored that is proper indication of the re-oxidation. Dielectric properties were studied in a broad range of frequencies. Both as-sintered and annealed samples exhibit high relative permittivity about 61 to 68, loss factor about 0.001 and resistivity in order 10 E11 Ωm.
Permanent Link: http://hdl.handle.net/11104/0288613