Grazing incidence interferometer for form measurement of hollow cylinders

0494377 - ÚPT 2019 RIV CZ eng C - Conference Paper (international conference)
Šarbort, Martin - Řeřucha, Šimon - Holá, Miroslava - Lazar, Josef
Grazing incidence interferometer for form measurement of hollow cylinders.
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 80-81. ISBN 978-80-87441-23-7.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Skalský dvůr (CZ), 04.06.2018-08.06.2018]
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : interferometry * surface metrology * hollow cylinders
OECD category: Optics (including laser optics and quantum optics)

Optical metrology of cylindrical specimens represents an interesting task in scientific and
industrial practice. The most precise measurement methods use principles of laser
interferometry where the phase difference between the reference wave and the object wave reflected from the tested surface is detected. The form measurement of hollow cylindrical tubes can be advantageously realized by an object wave with conical wavefronts generated by an axicon lens or an equivalent diffractive optical element. An axicon characterized by large apex angle forms a conical wave that fulfills the conditions of the grazing incidence, which results in suppression of the speckle noise. The previous experimental setups were relatively complex since they involved a pair of mutually reversed axicons or a pair of diffractive optical elements that transform the object wave from planar to conical and vice
versa.
Permanent Link: http://hdl.handle.net/11104/0287635