STEM modes in SEM

0494365 - ÚPT 2019 RIV CZ eng C - Conference Paper (international conference)
Konvalina, Ivo - Paták, Aleš - Mikmeková, Eliška - Mika, Filip - Müllerová, Ilona
STEM modes in SEM.
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 40-41. ISBN 978-80-87441-23-7.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Skalský dvůr (CZ), 04.06.2018-08.06.2018]
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : SEM * STEM
OECD category: Electrical and electronic engineering

The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope
(https://www.fei.com/) is used to detect transmitted electrons (TEs) and allows observing
samples in four imaging modes. Two modes of objective lens, namely high resolution (HR)
and ultra-high resolution (UHR), differ by their resolution and by the presence or absence of
a magnetic field around the sample. If the beam deceleration (BD) mode is chosen, then
an electrostatic field around the sample is added and two further microscope modes HR + BD
and UHR + BD, become available. Trajectories of TEs are studied with regard to their angular
and energy distribution in each mode in this work.

Permanent Link: http://hdl.handle.net/11104/0287599