Role of the Angular Distribution of Backscattered Electrons in Low Energy Scanning Electron Microscope

0493332 - ÚPT 2019 US eng A - Abstract
Müllerová, Ilona - Frank, Luděk - Konvalina, Ivo - Mikmeková, Eliška
Role of the Angular Distribution of Backscattered Electrons in Low Energy Scanning Electron Microscope.
Microscopy and Microanalysis. Cambridge University Press. Roč. 24, S1 (2018), s. 638-639. ISSN 1431-9276. E-ISSN 1435-8115.
[Microscopy & Microanalysis 2018 Meeting. 05.08.2018-09.08.2018, Baltimore]
R&D Projects: GA TA ČR(CZ) TE01020118
EU Projects: European Commission(XE) 606988 - SIMDALEE2
Institutional support: RVO:68081731
Keywords : angular distribution * backscattered electrons * low energy * SEM
OECD category: Nano-materials (production and properties)

The single-channel detection systems are the most often used for the detection of the Secondary
Electrons (SE) and Backscattered Electrons (BSE) in the Scanning Electron Microscope (SEM). Sometimes the segmented detector of BSE according to the azimuthal angle is used to optimize the material (sum signal) and topographic contrast (subtracted signal). To achieve high lateral resolution the
specimen is usually immersed in the strong magnetic field and/or in the strong electrostatic field, in the
case of the operation at low primary beam energies; we call this regime Cathode Lens Mode (CLM).
Those fields strongly influence the trajectories of the signal electrons.
Permanent Link: http://hdl.handle.net/11104/0286715