Impact of the shape of the differentially pumped chamber on critical flow character

0490115 - ÚPT 2019 RIV US eng C - Conference Paper (international conference)
Hlavatá, P. - Maxa, J. - Bílek, M. - Neděla, Vilém
Impact of the shape of the differentially pumped chamber on critical flow character.
ECS Transactions. Pennington: Electrochemical Society, 2017, Roč. 81, č. 1 (2017), s. 317-322. ISBN 9781607685395. ISSN 1938-6737.
[International Conference on Advanced Batteries, Accumulators and Fuel Cells, ABAF 2017 /18./. Brno (CZ), 10.09.2017-13.09.2017]
Institutional support: RVO:68081731
Keywords : critical flow * primary electron beams
OECD category: Thermodynamics

The Electrochemical Society. The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from the specimen chamber.
Permanent Link: http://hdl.handle.net/11104/0284444