Quantitative comparison of simulated and measured signals in the STEM mode of a SEM

0489596 - ÚPT 2019 RIV NL eng J - Journal Article
Walker, Christopher - Konvalina, Ivo - Mika, Filip - Frank, Luděk - Müllerová, Ilona
Quantitative comparison of simulated and measured signals in the STEM mode of a SEM.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 415, JAN (2018), s. 17-24. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
EU Projects: European Commission(XE) 606988 - SIMDALEE2
Institutional support: RVO:68081731
Keywords : low-energy electrons * multiple scattering * elastic-scattering * transmission
OECD category: Coating and films
Impact factor: 1.210, year: 2018

The transmission of electrons with energies 15 keV and 30 keV through Si and Au films of 100 nm thickness each have been studied in a Scanning Transmission Electron Microscope. The electrons that were transmitted through the films were detected using a multi-annular photo-detector consisting of a central Bright Field (BF) and several Dark Field (DF) detectors. For the experiment the detector was gradually offset from the axis and the signal from the central BF detector was studied as a function of the offset distance and compared with MC simulations. The experiment showed better agreement between experiment and several different MC simulations as compared to previous results, but differences were still found particularly for low angle scattering from Si. Data from Au suggest that high energy secondary electrons contribute to the signal on the central BF detector for low primary beam energies, when the STEM detector is in its usual central position.
Permanent Link: http://hdl.handle.net/11104/0283980