kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation

0487982 - FZÚ 2018 RIV US eng J - Journal Article
Endo, Akira - Smrž, Martin - Mužík, Jiří - Novák, Ondřej - Chyla, Michal - Mocek, Tomáš
kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation.
Journal of Micro-Nanolithography MEMS and MOEMS. Roč. 16, č. 4 (2017), s. 1-6, č. článku 041011. ISSN 1932-5150. E-ISSN 1932-5134
R&D Projects: GA MŠMT LO1602; GA ČR GA16-12960S; GA MŠMT LM2015086
EU Projects: European Commission(XE) 739573 - HiLASE CoE
Grant - others:OP VVV - HiLASE-CoE(XE) CZ.02.1.01/0.0/0.0/15_006/0000674
Institutional support: RVO:68378271
Keywords : EUV source * laser produced plasma * FEL * prepulse * thin-disc laser
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 1.299, year: 2017

The technology for EUV lithography sources is maturing. LPP sources with usable power >100W have been used in high-volume manufacturing applications and 250-W sources are expected to be introduced in HVM soon. However a further increase of power and cleanness may benefit a powerful picosecond laser in the near-infrared and wavelength converted spectral region. The HiLASE Centre has been working in thin-disc laser technology and has demonstrated a 0.5-kW platform Perla-C based on a very compact Yb:YAG regenerative amplifier. 100-kHz ps operation has been achieved with a fundamental spatial mode and excellent long-term pointing and energy stability.

Permanent Link: http://hdl.handle.net/11104/0282612