Pressure dependence of Ar.sup.+./sup..sub.2./sub., ArTi.sup.+./sup., and Ti.sup.+./sup..sub.2./sub. dimer formation in a magnetron sputtering discharge

0486976 - FZÚ 2018 RIV GB eng J - Journal Article
Hippler, R. - Čada, Martin - Straňák, V. - Hubička, Zdeněk - Helm, C.A.
Pressure dependence of Ar⁺₂, ArTi⁺, and Ti⁺₂ dimer formation in a magnetron sputtering discharge.
Journal of Physics D-Applied Physics. Roč. 50, č. 44 (2017), s. 1-8, č. článku 445205. ISSN 0022-3727. E-ISSN 1361-6463
R&D Projects: GA ČR GA17-08389S
Institutional support: RVO:68378271
Keywords : magnetron sputtering * ion mass spectrometry * dimer formation * cluster formation
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.373, year: 2017

Formation of Ar+ and Ti+ monomers and of Ar2+, ArTi+, and Ti2+ dimer ions in a magnetron sputtering discharge with a Ti cathode and at argon gas pressures of 0.3-2.1 Pa was investigated by means of energy-resolved mass spectrometry. An unbalanced 2 inch magnetron operated in direct current mode with a power of 150 W (typical operation voltage -365 V) was employed. Energy spectra of Ar+ and Ti+ ions show distinct features which are related to the specific formation processes taking place at the Ti cathode or resulting from gas phase reactions. Formation of Ar2+, ArTi+, and Ti2+ dimer ions show pronounced pressure dependencies which can be attributed to distinct formation and loss processes. Ti2+ ions originate from direct sputtering of Ti2 dimers and the subsequent ionization in the plasma region.
Permanent Link: http://hdl.handle.net/11104/0281683