Cathode voltage and discharge current oscillations in HiPIMS

0486975 - FZÚ 2018 RIV GB eng J - Journal Article
Klein, P. - Hnilica, J. - Hubička, Zdeněk - Čada, Martin - Šlapanská, M. - Zemánek, M. - Vašina, P.
Cathode voltage and discharge current oscillations in HiPIMS.
Plasma Sources Science & Technology. Roč. 26, č. 5 (2017), s. 1-12, č. článku 055015. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA ČR(CZ) GA15-00863S
Institutional support: RVO:68378271
Keywords : HiPIMS * voltage and current oscillations * spokes
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.939, year: 2017

This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a. high- power impulse magnetron sputtering pulse. Detailed. experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations. originated. from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the. absence of. spokes were found. The oscillations were not caused by the rotational motion of the spokes but. emerged when a. certain threshold amount of spokes was overreached.
Permanent Link: http://hdl.handle.net/11104/0281682