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Study of mechanical properites of nanostructured polymer coatings prepared using plasma enhanced chemical vapor deposition
- 1.0486368 - ÚJF 2018 RIV CZ eng C - Conference Paper (international conference)
Buršíková, V. - Homola, V. - Peřina, Vratislav
Study of mechanical properites of nanostructured polymer coatings prepared using plasma enhanced chemical vapor deposition.
NANOCON 2015: 7th International Conference on Nanomaterials - Research and Application, Conference Proceedings. Ostrava: TANGER, spol. s r.o., 2015, s. 105-110. ISBN 978-80-87294-63-5.
[7th International Conference on Nanomaterials - Research and Application. Brno (CZ), 14.10.2015-16.10.2015]
Institutional support: RVO:61389005
Keywords : PECVD * hexamethyldisiloxane * mechanical properties
OECD category: Fluids and plasma physics (including surface physics)
The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/ oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.
Permanent Link: http://hdl.handle.net/11104/0281200
Number of the records: 1