Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems

0486284 - FZÚ 2019 RIV CZ eng C - Conference Paper (international conference)
Domonkos, Mária - Ižák, Tibor - Stolcova, L. - Proška, J. - Kromka, Alexander
Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems.
NANOCON 2013 - 5th International Conference Proceedings. Ostrava: TANGER Ltd, 2014, s. 34-38. ISBN 978-80-87294-47-5.
[5th International Conference Nanocon 2013. Brno (CZ), 16.10.2013-18.10.2013]
R&D Projects: GA ČR GAP108/12/0910
Institutional support: RVO:68378271
Keywords : nanosphere lithography * reactive ion etching * pulsed linear-antenna microwave plasma * polystyrene microspheres * Langmuir-Blodgett monolayers
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). It was found out that choosing optimal parameters results in a tunable diameter of PM with various shapes (from spheres to pyramid-like structures) while keeping their periodic hexagonal ordering.
Permanent Link: http://hdl.handle.net/11104/0281147