The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg.sub.2./sub.Si nanoparticles

0486272 - FZÚ 2018 RIV CZ eng C - Conference Paper (international conference)
Stuchlíková, The-Ha - Stuchlík, Jiří - Remeš, Zdeněk - Fajgar, Radek - Galkin, N.G. - Galkin, K.N. - Chernev, I.M.
The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg₂Si nanoparticles.
NANOCON 2013 - 5th International Conference Proceedings. Ostrava: TANGER Ltd, 2014, s. 145-150. ISBN 978-80-87294-47-5.
[5th International Conference Nanocon 2013. Brno (CZ), 16.10.2013-18.10.2013]
Institutional support: RVO:68378271 ; RVO:67985858
Keywords : Mg₂Si nanoparticles * a-Si/a-Si:H matrix * RDA * PECVD * RLA
OECD category: Condensed matter physics (including formerly solid state physics, supercond.); Physical chemistry (UCHP-M)

We study possibilities how to increase a by usage of magnesium silicide nanoparticles (Mg2Si-NPs) in structure of Si: H. In this paper we introduce two technics -combination of PECVD and Vacuum Evaporation (VE) and Reactive Laser Ablation (RLA) -for preparation of cubic structure of Mg2Si-NPs in amorphous (a-Si) or amorphous hydrogenated (a-Si: H) silicon matrix. Formation of Mg2Si-NPs was proved by Raman spectroscopy. Likewise we introduce optical changes measured at absorption edge and the first results on realized NIP structures.
Permanent Link: http://hdl.handle.net/11104/0281141