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Active frequency tuning of the cantilever nanoresonator utilizing a phase transformation of NiTi thin film

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    0483366 - FZÚ 2018 RIV LT eng J - Journal Article
    Stachiv, Ivo - Šittner, Petr - Jeng, Y.-R. - Vokoun, David
    Active frequency tuning of the cantilever nanoresonator utilizing a phase transformation of NiTi thin film.
    Journal of Vibroengineering. Roč. 19, č. 7 (2017), s. 5161-5169. ISSN 1392-8716
    R&D Projects: GA ČR GC15-13174J
    Institutional support: RVO:68378271
    Keywords : nanoresonator * resonant frequency * thin film * smart memory alloys * NiTi film
    OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
    Impact factor: 0.398, year: 2016

    Due to their small sizes, compactness, low cost, high sensitivity, high resolution and extraordinary physical properties, nanoresonators have attracted a widespread attention from the scientific community. It is required that the nanoresonators can operate at desired but adjustable resonant frequencies. In this work, we present a novel active frequency tuning method utilizing a large change of the Young's modulus (more than 50 %) and generated interlayer stress (up a few hundred of MPa) during a phase transformation of NiTi thin film deposited on an elastic substrate. We show that this tuning mechanism can allow one to achieve the extraordinary high fundamental resonant frequency tunability (~30 %). The impact of NiTi film thickness and dimensions on the first three consecutive resonant frequencies of the cantilever nanobeam is examined.
    Permanent Link: http://hdl.handle.net/11104/0278713

     
     
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