0481584 - ÚPT 2018 RIV HR eng C - Conference Paper (international conference)
Schauer, Petr - Lalinský, Ondřej - Kučera, M. - Lučeničová, Z.
Superfast scintillators for SEM electron detectors.
13th Multinational Congress on Microscopy: Book of Abstracts. Zagreb: Ruder Bošković Institute, Croatian Microscopy Society, 2017 - (Gajović, A.; Weber, I.; Kovačević, G.; Čadež, V.; Šegota, S.; Peharec Štefanić, P.; Vidoš, A.), s. 132-133. ISBN 978-953-7941-19-2.
[Multinational Congress on Microscopy /13./. Rovinj (HR), 24.09.2017-29.09.2017]
R&D Projects: GA ČR(CZ) GA16-05631S; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : electron detector * scintillator * multicomponent garnet film * liquid phase epitaxy * cathodoluminescence
OECD category: Electrical and electronic engineering

Scanning electron microscopes (SEM) require a high-quality electron detector. Such an electron detector must primarily be very fast to process a large number of imaging data in real time. For example, for the acquisition of a high-quality image in a scanning electron microscope (SEM) in real time, it is usually required to process each pixel in less than 100 ns without a loss of contrast. If the mentioned electron detectors are to be formed by scintillation detection systems, they must be equipped with very fast scintillators having a short decay time (decay to 1/e value, where e is the base of natural logarithms) and low afterglow even at a microsecond time range after an excitation cut-off. The scintillator with the long decay time causes an image blur and the scintillator with the high afterglow reduces image contrast in the SEM. In the scintillation electron detectors, Czochralski grown single-crystal scintillators such as YAG:Ce and YAP:Ce, whose cathodoluminescence (CL) properties have been thoroughly studied, are commonly used.
Permanent Link: http://hdl.handle.net/11104/0277128