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Effect of axial aberrations on the degree of coherence in SEM
- 1.0480603 - ÚPT 2018 AT eng A - Abstract
Řiháček, Tomáš - Müllerová, Ilona
Effect of axial aberrations on the degree of coherence in SEM.
Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons 2017 (SIMDALEE2017). Book of Abstracts.. Wien: Institut für Angewandte Physik, 2017. s. 50.
[SIMDALEE2017. Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons. 18.09.2017-22.09.2017, Pula]
R&D Projects: GA TA ČR(CZ) TE01020118
EU Projects: European Commission(XE) 606988 - SIMDALEE2
Institutional support: RVO:68081731
Keywords : axial aberrations * SEM
OECD category: Electrical and electronic engineering
We study the influence of axial aberrations on the degree of coherence in a scanning electron microscope. The effect of the chromatic aberration turns out to be important, especially for energies below a few keV, and this threshold depends upon geometrical parameters of the optical system.
Permanent Link: http://hdl.handle.net/11104/0276339
Number of the records: 1