Micromachined Sensors Based on ZnO Structures and Their Thermo- and Photo-Activated Response to Reducing Gases

0478865 - ÚFM 2018 RIV ES eng C - Conference Paper (international conference)
Vallejos, S. - Gracia, I. - Figueras, E. - Cane, C. - Pizúrová, Naděžda - Hubálek, J.
Micromachined Sensors Based on ZnO Structures and Their Thermo- and Photo-Activated Response to Reducing Gases.
2017. ISBN 978-1-5090-5072-7. ISSN 2163-4971. In: 2017 SPANISH CONFERENCE ON ELECTRON DEVICES (CDE). New York: IEEE, 2017, č. článku 7905206. Spanish Conference on Electron Devices. ISBN 978-1-5090-5072-7. ISSN 2163-4971.
[CDE 2017 - Spanish Conference on Electron Devices. Barcelona (ES), 08.02.2017-10.02.2017]
Institutional support: RVO:68081723
Keywords : ZnO * rods * AACVD * gas sensing * photo-activation
OECD category: Physical chemistry

ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo- activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 degrees C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.
Permanent Link: http://hdl.handle.net/11104/0274940