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Vacuum-ultraviolet ellipsometry spectra and optical properties of Ba(Zr,Ti)O.sub.3./sub. films
- 1.0475008 - FZÚ 2018 RIV CH eng J - Journal Article
Suchaneck, G. - Chernova, Ekaterina - Kleiner, A. - Liebschner, R. - Jastrabík, Lubomír - Meyer, D.C. - Dejneka, Alexandr - Gerlach, G.
Vacuum-ultraviolet ellipsometry spectra and optical properties of Ba(Zr,Ti)O3 films.
Thin Solid Films. Roč. 621, Jan (2017), s. 58-62. ISSN 0040-6090. E-ISSN 1879-2731
R&D Projects: GA ČR GA15-13778S
Institutional support: RVO:68378271
Keywords : barium zirconate titanate thin film * film structure * VUV ellipsometry * optical properties
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 1.939, year: 2017
In this work, we determine the dielectric functions of multi-target, reactively sputtered Ba(Zr0.2Ti0.8)O-3 by spectroscopic ellipsometry in the photon energy range from 0.8 to 8.7 eV. Based on this data, we discuss the interband transition energies and the spectral dependencies of the refractive index and the absorption coefficient.
Permanent Link: http://hdl.handle.net/11104/0271889
Number of the records: 1