In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves

0469096 - ÚT 2017 RIV GB eng J - Journal Article
Grabec, T. - Sedlák, Petr - Stoklasová, Pavla - Thomasová, M. - Shilo, D. - Kabla, M. - Seiner, Hanuš - Landa, Michal
In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves.
Smart Materials and Structures. Roč. 25, č. 12 (2016), č. článku 127002. ISSN 0964-1726. E-ISSN 1361-665X
R&D Projects: GA ČR GA14-15264S
Institutional support: RVO:61388998
Keywords : thin films * shape memory alloys * surface acoustic waves
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 2.909, year: 2016

The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the. determination of the. local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the. Young's modulus, and can. thus be. used for monitoring of the spatial distribution of the. functional properties in films prepared by a combinatorial sputtering approach.
Permanent Link: http://hdl.handle.net/11104/0266993