Prism coupling technique for characterization of the high refractive index planar waveguides

0468194 - FZÚ 2017 RIV RO eng J - Journal Article
Prajzler, V. - Nekvindová, P. - Varga, Marián - Bruncko, J. - Remeš, Zdeněk - Kromka, Alexander
Prism coupling technique for characterization of the high refractive index planar waveguides.
Journal of Optoelectronics and Advanced Materials. Roč. 18, 11-12 (2016), s. 915-921. ISSN 1454-4164. E-ISSN 1841-7132
R&D Projects: GA ČR(CZ) GA14-05053S
Institutional support: RVO:68378271
Keywords : high index contrast * optical planar waveguides * zinc oxide * nanocrystalline diamond * gallium nitride
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.449, year: 2016

We present the study of properties of semiconductor optical planar waveguides fabricated from materials with high refractive index. The nanocrystalline diamond and nanocrystalline zinc oxide planar waveguides have been deposited by microwave plasma enhanced chemical vapour deposition and by pulse laser deposition on glass substrates. Monocrystalline gallium nitride planar waveguides were prepared by metalorganic chemical vapour deposition on sapphire substrates. The morphology of prepared layers was characterized using scanning electron microscopy, Raman spectroscopy and X-ray diffraction. Waveguiding properties and the refractive indices of prepared thin films were determined by prism coupling technique and our measurement shows that our samples had waveguiding properties for all measured wavelengths from ultraviolet to infrared spectral range.
Permanent Link: http://hdl.handle.net/11104/0266040