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Coordinate interferometric measuring system for positioning of a sample in electron-beam writer
- 1.0467527 - ÚPT 2017 PL eng A - Abstract
Lazar, Josef - Holá, Miroslava - Hrabina, Jan - Oulehla, Jindřich - Číp, Ondřej - Valtr, M. - Klapetek, P.
Coordinate interferometric measuring system for positioning of a sample in electron-beam writer.
NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. Wroclaw: Wroclaw University of Technology, 2016.
[NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./. 09.03.2016-11.03.2016, Wroclaw]
Institutional support: RVO:68081731
Keywords : SPM * nanometrology * nanoscale * nanopositioning interferometry
Subject RIV: BH - Optics, Masers, Lasers
The short-range scanning probe microscope (SPM) system developed in cooperation between Institute of Scientific Instruments (ISI) and Czech Metrology Institute (CMI) has been modified by new interferometers developed at ISI.
Permanent Link: http://hdl.handle.net/11104/0265623
Number of the records: 1