XUV spectra of 2nd transition row elements: identification of 3d-4p and 3d-4f transition arrays

0466449 - FZÚ 2017 RIV GB eng J - Journal Article
Lokasani, R. - Long, E. - Maguire, O. - Sheridan, P. - Hayden, P. - O'Reilly, F. - Dunne, P. - Sokell, E. - Endo, Akira - Limpouch, Jiří - O'Sullivan, G.
XUV spectra of 2nd transition row elements: identification of 3d-4p and 3d-4f transition arrays.
Journal of Physics B-Atomic Molecular and Optical Physics. Roč. 48, č. 24 (2015), 1-12, č. článku 245009. ISSN 0953-4075. E-ISSN 1361-6455
R&D Projects: GA MŠMT(CZ) LG13029
Institutional support: RVO:68378271
Keywords : laser produced plasma * water window * unresolved transition arrays * yttrium * niobium * ruthenium * rhodium
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.833, year: 2015

The use of laser produced plasmas (LPPs) in extreme ultraviolet/soft x-ray lithography and metrology at 13.5 nm has been widely reported and recent research efforts have focused on developing next generation sources for lithography, surface morphology, patterning and microscopy at shorter wavelengths. In this paper, the spectra emitted from LPPs of the 2nd transition row elements from yttrium (Z = 39) to palladium (Z = 46), with the exception of zirconium (Z = 40) and technetium (Z = 43), produced by two Nd:YAG lasers which delivered up to 600 mJ in 7 ns and 230 mJ in 170 ps, respectively, are reported.
Permanent Link: http://hdl.handle.net/11104/0264735