Practical Use of Scanning Low Energy Electron Microscope (SLEEM)

0465457 - ÚPT 2017 RIV US eng J - Journal Article
Müllerová, Ilona - Mikmeková, Eliška - Mikmeková, Šárka - Konvalina, Ivo - Frank, Luděk
Practical Use of Scanning Low Energy Electron Microscope (SLEEM).
Microscopy and Microanalysis. Roč. 22, S3 (2016), s. 1650-1651. ISSN 1431-9276. E-ISSN 1435-8115
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : scanning low energy * SLEEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.891, year: 2016

The high negative bias of a sample in a scanning electron microscope constitutes the cathode lens (CL), with a strong electric field just above the sample surface [1] offers a tool for controlling the landing
energy of electrons down to units or even fractions of electronvolts. Moreover, the field accelerates and collimates the signal electrons to earthed detectors above and below the sample, thereby assuring high
collection efficiency and high amplification of the image signal. One important feature is the ability to acquire the complete emission of the backscattered electrons, including those emitted at high angles with respect to the surface normal. The cathode lens aberrations are proportional to the landing energy of electrons, so the spot size becomes nearly constant throughout the full energy scale.
Permanent Link: http://hdl.handle.net/11104/0264011