Blaze Gratings with a Ribbed Back Slope

0464389 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
Krátký, Stanislav - Meluzín, Petr - Horáček, Miroslav - Kolařík, Vladimír - Matějka, Milan - Chlumská, Jana - Král, Stanislav
Blaze Gratings with a Ribbed Back Slope.
NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 757-761. ISBN 978-80-87294-71-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : nano patterning * blazed diffraction grating * Gaussian-type beam * variable-shaped beam * electron beam writer
OECD category: Nano-processes (applications on nano-scale)

Binary relief phase-modulated gratings provide symmetrical diffraction of the incoming light beam. Asymmetrical gratings, e.g. asymmetrical triangular blazed gratings, are characteristic by an asymmetrical diffraction behavior, where one of the first diffraction orders is more important than the other one. Electron beam lithography is a suitable and flexible tool for patterning of such kind of gratings. High quality results can be readily obtained when the period of the grating is relatively large and the relief depth is relatively low, this is the case of gratings with a small blaze angle. As the blaze angle increases, the quality of result suffers from several patterning-related issues. One of the problems is a reflection of the incoming light beam from the back slope (anti-blaze facet) of the blaze grating. We propose a novel configuration, with a ribbed modulation of the back slope. This modulation is perpendicular to the direction of the grating grooves. This paper presents an analysis of the proposed blazed grating configuration. E-beam pattern generators were used to prepare a few
samples of blaze gratings with a ribbed back slope. One part of the experiment was performed with a Gaussianshaped beam and another one with the variable-shaped beam. Results of the experiment are presented.
Finally, we discuss the optical performance of two blaze gratings with similar parameters, one of them is with the flat back slope and another one is with the ribbed back slope.
Permanent Link: http://hdl.handle.net/11104/0270770