- Comparison of SIMS and RBS for depth profiling of silica glasses impl…
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Comparison of SIMS and RBS for depth profiling of silica glasses implanted with metal ions

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    0464368 - ÚFE 2017 RIV US eng J - Journal Article
    Lorinčík, Jan - Veselá, D. - Vytykáčová, S. - Švecová, B. - Nekvindová, P. - Macková, Anna - Mikšová, Romana - Malinský, Petr - Boettger, R.
    Comparison of SIMS and RBS for depth profiling of silica glasses implanted with metal ions.
    Journal of Vacuum Science & Technology B. Roč. 34, č. 3 (2016), č. článku 03H129. ISSN 1071-1023. E-ISSN 2166-2754
    R&D Projects: GA ČR GA15-01602S; GA MŠMT(CZ) LM2011019
    Institutional support: RVO:67985882 ; RVO:61389005
    Keywords : Nanoparticles * Spectroscopy * Backscattering
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering; BG - Nuclear, Atomic and Molecular Physics, Colliders (UJF-V)
    Impact factor: 1.573, year: 2016 ; AIS: 0.35, rok: 2016
    DOI: https://doi.org/10.1116/1.4944525
    Permanent Link: http://hdl.handle.net/11104/0263496
     
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