Surface acoustic waves in the layered systems

0463875 - FZÚ 2017 RIV CZ eng C - Conference Paper (international conference)
Tarasenko, Alexander - Boháč, Petr - Jastrabík, Lubomír
Surface acoustic waves in the layered systems.
EWGAE 2016. Proceedings of the European Conference on Acoustic Emission Testing /32./, vol. 2. Brno: VUTIUM, 2016 - (Mazal, P.; Pazdera, L.), s. 485-493. ISBN 978-80-214-5386-9.
[European Conference on Acoustic Emission Testing /32./( EWGAE 2016 ). Praha (CZ), 07.09.2016-09.09.2016]
R&D Projects: GA MŠMT LO1409; GA TA ČR TA03010743
Institutional support: RVO:68378271
Keywords : laser acoustic method * surface acoustic waves * layered systems * Ti films * diamond-like carbon films
Subject RIV: BI - Acoustics

The laser acoustic method was used for analysis of two layered systems: thin titanium and diamond like carbon films both deposited on silicon. The film and substrate parameters are determined by fitting the theoretical curve to the measured dispersion curve. The fit software seeks that set of the system parameters whose theoretical curve coincides the best with the experimental data. For the titanium film the best root-mean square deviation was 2.04 m/s with the relative error < O.I % and for the DLC system the corresponding value was 0.30 m/s (the relative error < O.O1 % ).
Permanent Link: http://hdl.handle.net/11104/0262960