Ion Micro Beam, promising methods for interdisciplinary research

0460790 - ÚJF 2017 RIV GB eng J - Journal Article
Cutroneo, Mariapompea - Havránek, Vladimír - Torrisi, L. - Švecová, B.
Ion Micro Beam, promising methods for interdisciplinary research.
Journal of Instrumentation. Roč. 11, MAY (2016), C05001. ISSN 1748-0221. E-ISSN 1748-0221
R&D Projects: GA ČR(CZ) GBP108/12/G108; GA MŠMT(CZ) LM2011019
Institutional support: RVO:61389005
Keywords : accelerator application * accelerator subsystems and technolgies * ion sources
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders
Impact factor: 1.220, year: 2016

An increasing attractiveness of top-down nanotechnology using nuclear microprobe techniques have been gathered to the micro and nano patterning process for polymers. This paper presents the research activity on innovative promising techniques able to produce three-dimensional (3D) micro-structures in polymeric resists as well as to obtain images of fabricated nanostructures at Tandetron Laboratory (LT) of the Nuclear Physics Institute in Rez (Czech Republic). The Proton Beam Writing (PBW) technique was used to irradiate PMMA resist with energy of MeVs protons. The fabricated patterns were developed in chemical bath using different etching rates. An overview of micro-scale structures have been fabricated selecting the beam, the energy, the fluence and the exposition time. The produced structures were investigated by different analysis techniques among which Scanning Transmission Ion Microscopy (STIM). The characterizations of the fabricated microtunnels are presented and discussed.
Permanent Link: http://hdl.handle.net/11104/0260782