Optimal X-ray detection for thin samples in low-energy STEM

0460207 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Rozbořil, Jakub - Oral, Martin - Radlička, Tomáš
Optimal X-ray detection for thin samples in low-energy STEM.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 44-45. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
Institutional support: RVO:68081731
Keywords : electron microscopy * EDS * STEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/

In many applications it is desirable to perform energy-dispersive X-ray spectroscopy (EDS) on very thin samples at low primary beam energies in a STEM. Thin samples, or lamellae, with the thickness of about 10 nm, are mostly prepared in focused ion beam instruments (FIBs), and they are used to evaluate experiments in the development of thin films and coatings, in the semiconductor industry, and in other applications. EDS then provides a map of different chemical elements or compounds in the sample, obtained by scanning the electron beam in a raster. Often the qualitative composition is known as a limited set of materials and only their distribution on the sample is to be determined. For large batches of samples fast measurements are desired to maximize utilization of expensive equipment. In this study we found a method to minimize the time needed to reliably acquire an elemental map by determining the optimal detector placement and the minimal necessary primary electron dose per pixel.
Permanent Link: http://hdl.handle.net/11104/0260339