Bandpass filter for secondary electrons in SEM - experiments

0460205 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Mika, Filip - Konvalina, Ivo - Krátký, Stanislav - Müllerová, Ilona
Bandpass filter for secondary electrons in SEM - experiments.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 36-37. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : electron microscopy * TLD
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/

Bandpass energy filtering using a through-the-lens secondary electron (TLD) detector in a field emission gun SEM (FEG-SEM) has been known over a decade. During energy filtering, image contrast is changed and new information about the material can be observed. Our motivation for this study was to compare theoretical calculations with the experimental data
of the SE bandpass energy filter in Magellan 400 FEG SEM. The TLD detector works as a bandpass energy filter for the special setup of electrode potentials inside the objective lens, with the positive potential on the specimen regulating the energy window.
Permanent Link: http://hdl.handle.net/11104/0260337