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Deposition and Analysis of Hard and Moderately Ductile MoBC Coatings by pulsed DC Sputtering

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    0458471 - ÚJF 2017 RIV SK eng C - Conference Paper (international conference)
    Peřina, Vratislav - Souček, P. - Vašina, P. - Buršíková, V. - Havránek, Vladimír
    Deposition and Analysis of Hard and Moderately Ductile MoBC Coatings by pulsed DC Sputtering.
    Book of Contributed Papers. Bratislava: Comenius University in Bratislava, 2015, s. 248-252. ISBN 978-80-8147-027-1.
    [Symposium on Application of Plasma Processes COST TD1208 Workshop on Application of Gaseous Plasma with Liquids: SAPP XX /20./. Tatranská Lomnica (SK), 17.01.2015-22.01.2015]
    R&D Projects: GA MŠMT(CZ) LM2011019
    Institutional support: RVO:61389005
    Keywords : coatings * DC magnetron sputtering * RBS
    Subject RIV: BL - Plasma and Gas Discharge Physics

    Superhard MoxByCz coatings with promising mechanical properties were prepared by pulsed DC magnetron sputtering. Structure information obtained from XRD is not enough to optimize the deposition process to reach stoichiometric Mo2BC film. EDX and WDX technique does not show sufficient resolution to distinguish Mo and B in the spectra. Rutherford back scattering it very suitable technique to evaluate chemical composition of the whole of prepared coatings and it was used for optimization of the coating stoichiometry.
    Permanent Link: http://hdl.handle.net/11104/0258742

     
     
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