Measurements of current density distribution in shaped e-beam writers

0454665 - ÚPT 2016 RIV NL eng J - Journal Article
Bok, Jan - Horáček, Miroslav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Krzyžánek, Vladislav
Measurements of current density distribution in shaped e-beam writers.
Microelectronic Engineering. Roč. 149, JAN 5 (2016), s. 117-124. ISSN 0167-9317. E-ISSN 1873-5568
R&D Projects: GA ČR(CZ) GA14-20012S; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : shaped e-beam writer * electron beam * current density
Subject RIV: JB - Sensors, Measurment, Regulation
Impact factor: 1.806, year: 2016

In this paper, we present four measurement methods for the two-dimensional mapping of the current density distribution in variable-shaped e-beam writers. All the methods use only the native equipment of the e-beam writer which provides the advantage of relatively easy implementation. The first and second measurement methods are based on the knife-edge technique in which the e-beam is scanned in two directions across a Faraday cup opening and across shaping shutters of the forming system, respectively. In the thirdmethod, a phosphor screen is irradiated by a magnified e-beam spot and the current density distribution is represented by the luminescence image on the screen. The fourth method uses electron sensitive resist which is exposed by the e-beam. The developed resist is observed under a microscope and the current density distribution is judged fromthe resist profile. All the methods are demonstrated in an example, compared, and their spatial resolution and accuracy evaluated.
Permanent Link: http://hdl.handle.net/11104/0255378