Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system

0454568 - FZÚ 2016 RIV DE eng J - Journal Article
Taylor, Andrew - Ashcheulov, Petr - Čada, Martin - Fekete, Ladislav - Hubík, Pavel - Klimša, Ladislav - Olejníček, Jiří - Remeš, Zdeněk - Jirka, Ivan - Janíček, P. - Bedel-Pereira, E. - Kopeček, Jaromír - Mistrík, J. - Mortet, Vincent
Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system.
Physica Status Solidi A. Roč. 212, č. 11 (2015), s. 2418-2423. ISSN 1862-6300. E-ISSN 1862-6319
R&D Projects: GA ČR GA13-31783S; GA MŠMT LO1409
Grant - others:FUNBIO(XE) CZ.2.16/3.1.00/21568
Institutional support: RVO:68378271 ; RVO:61388955
Keywords : diamond * electrical conductivity * nanocrystalline materials * optical emission spectroscopy * plasma enhanced chemical vapour deposition * SiC
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.648, year: 2015

The addition of CO2 into the process gas has a significant impact on the quality and the incorporation of boron in CVD diamond layers. In this report we study the effect of CO2 addition in the gas phase on the properties of boron doped nano-crystalline diamond (BNCD) layers grown at low substrate temperatures (450–500 °C) using a microwave linear antenna plasma-enhanced chemical vapour deposition apparatus (MW-LA-PECVD). Experimental results show an increase in the layers' conductivity with a reduction in CO2 concentration, which is consistent with the variation in the atomic boron emission line intensity measured by optical emission spectroscopy (OES). At CO2 concentrations close to zero, we observed the formation of a smooth, transparent and highly resistive layer on unseeded substrates.
Permanent Link: http://hdl.handle.net/11104/0255231