EUV nanosecond laser ablation of silicon carbide, tungsten and molybdenum

0452428 - ÚFP 2016 RIV JP eng C - Conference Paper (international conference)
Frolov, Oleksandr - Koláček, Karel - Schmidt, Jiří - Štraus, Jaroslav - Choukourov, A. - Kasuya, K.
EUV nanosecond laser ablation of silicon carbide, tungsten and molybdenum.
Conference proceedings of 9th International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference and 33rd Symposium on Plasma Processing. Meieki, Nakamura-ku, Nagoya: Japan Society of Applied Physics, 2015 - (Toyoda, H.; Vukovic, M.), GT1.00124-GT1.00124. APS Meeting. ISBN 978-4-86348-529-7.
[International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference and 33rd Symposium on Plasma Processing/9./. Honolulu, Hawaii (US), 12.10.2015-16.10.2015]
R&D Projects: GA MŠMT(CZ) LG13029; GA ČR(CZ) GA14-29772S
Institutional support: RVO:61389021
Keywords : EUV laser * laser ablation * tungsten * silicon carbide * molybdenum * surface modification * capillary discharge
Subject RIV: BL - Plasma and Gas Discharge Physics

In this paper we present results of study interaction of nanosecond EUV laser pulses at wavelength of 46.9 nm with silicon carbide, tungsten and molybdenum. As a source of laser radiation was used discharge plasma driver CAPEX (CAPillary EXperiment) based on high current capillary discharge in argon. The laser beam is focused with a spherical Si/Sc multilayer coated mirror on samples. Experimental study has been performed with 1, 5, 10, 20 and 50 laser pulses ablation of silicon carbide, tungsten and molybdenum at various fluence values. Sample surface modification in the nanosecond time scale have been inspected optically.
Permanent Link: http://hdl.handle.net/11104/0253422