Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering

0450986 - FZÚ 2016 RIV DE eng A - Abstract
Bulíř, Jiří - Novotný, Michal - Pokorný, Petr - Lančok, Ján - Musil, Jindřich - Rouček, V. - Veselý, J. - Dražan, L.
Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering.
International Conference on Plasma Surface Engineering /14./ PSE 2014. Garmisch-Partenkirchen: PSE, 2014 - (Bräuer, G.). OR 1207
[International Conference on Plasma Surface Engineering /14./ PSE 2014. 15.09.2014-19.09.2014, Garmisch-Partenkirchen]
R&D Projects: GA TA ČR(CZ) TA03010490
Institutional support: RVO:68378271
Keywords : magnetron sputtering * microwave waveguide * inner walls
Subject RIV: BM - Solid Matter Physics ; Magnetism

The quality of microwave waveguide components is determined by the electrical properties of the thin sub-surface layer of the waveguide inner walls. In this work we present a deposition apparatus for coating of inner walls of the waveguide components. This apparatus uses principles of magnetron sputtering method. Nevertheless, the design ofthe apparatus has been significantly modified because of low transverse dimensions and significant length of the waveguide. For experiments, we used waveguides for band 8.2 to 12.4 GHz with cross-section dimensions 10.2 x 22.9 mm 2 and length 250 mm. The inner walls of the waveguide were coated by 1 um of silver layer. The thickness uniformity of the coating was controlled by continuous movement of the magnetic field along the waveguide. The deposition rate was estimated from the coating thickness on the “witness” silicon substrate placed inside the waveguide during the sputtering process.
Permanent Link: http://hdl.handle.net/11104/0252155