Number of the records: 1
Laser micromachining of glass, silicon, and ceramics
- 1.0449555 - FZÚ 2016 RIV US eng J - Journal Article
Řiháková, L. - Chmelíčková, Hana
Laser micromachining of glass, silicon, and ceramics.
Advances in Materials Science and Engineering. Roč. 2015, Feb (2015), s. 584952. ISSN 1687-8434. E-ISSN 1687-8442
Institutional support: RVO:68378271
Keywords : laser micromachining of materials * laser material treatment
OECD category: Materials engineering
Impact factor: 1.010, year: 2015
Method of publishing: Open access
A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.
Permanent Link: http://hdl.handle.net/11104/0251085
Number of the records: 1