Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

0444439 - ÚPT 2016 RIV CH eng J - Journal Article
Lazar, Josef - Klapetek, P. - Valtr, M. - Hrabina, Jan - Buchta, Zdeněk - Číp, Ondřej - Čížek, Martin - Oulehla, Jindřich - Šerý, Mojmír
Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy.
Sensors. Roč. 14, č. 1 (2014), s. 877-886. E-ISSN 1424-8220
R&D Projects: GA ČR GPP102/11/P820; GA MŠMT ED0017/01/01; GA MŠMT EE2.4.31.0016; GA TA ČR TA02010711; GA TA ČR TE01020233
Institutional support: RVO:68081731
Keywords : nanometrology * nanopositioning interferometry * AFM * nanoscale
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 2.245, year: 2014

We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 x 200 x 10) mu m. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
Permanent Link: http://hdl.handle.net/11104/0246959